Currently, LMIS conductive liquid sources (Liquid Metal Ion Source) and its variants offer high brightness and long service life. However, they have certain inconveniences such as a limited choice of ions that can be obtained (LMIS, MiLICIS, ILIS). The presence of droplets, in addition to pure ionic species, can generate beam focusing and cause contamination (ILIS). Finally, the complexity of certain systems can increase the rate of breakdown (notably with surface ionization sources).
The technological innovation in this case concerns the source of the ions. This approach makes it possible to perform ion extraction within a wide range of compatibility*, with high ionic purity (90%), no contamination and dual charge (+/-). The technology improves the separation of charges, reduces or eliminates the redox effects and the source has a sufficiently long service life (over 500 hours).
*especially ions that are currently difficult to obtain (i.e. toll machining requests (NO3-), boranes for ion implantation, Cs+ and I- for imaging, etc.) and nanoparticles.